Piezoelectric Microsystem Technologies (PMT)

Research output

Research output per year 2017 2022 2023 2024

• 37 Conference Paper
• 11 Article
• 8 Paper
• 8 Poster
• 4 More
  • 2 Abstract
  • 1 Review article
  • 1 Patent

Research output per year

Research output per year

Search results

• 2024

  Two-Dimensional Piezoelectrically Actuated Micromirror with Fast Focusing Function

  Sasaki, T., Piot, A., Fleury, C., Rodrigues Palma Guerreiro, S., Rocha, R. T. & Lagosh, A., 22 Jan 2024, 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS).

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper
• 2023

  Actuation And Sensing For PZT Micromirrors Using d33 Mode Directional Interdigitated Electrodes

  Thakkar, P., Lagosh, A., Petschnigg, M., Holzmann, D. & Pribosek, J., 1 Nov 2023, (Accepted/In press) IEEE SENSORS 2023.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  Open Access

  File

  • actuation 100%
  • electrodes 58%
  • torsion 30%
  • microelectromechanical systems 15%
  • flexibility 14%

• ARBITRARY SHAPED BACKSIDE REINFORCEMENT FOR TWO DIMENSIONAL RESONANT MICROMIRRORS

  Sasaki, T., Piot, A., Lagosh, A., Fleury, C., Bainschab, M., Zhai, Y., Baumgart, M., Rodrigues Palma Guerreiro, S., Holzmann, D., Travnik, A. & Moridi, M., 2 Jan 2023, IEEE MEMS 2023. p. 1107 4 p.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

• Dual-frequency piezoelectric micromachined ultrasonic transducers for fundamental and harmonic imaging

  Zhai, Y., Maqsood, W., Da, Z., Andrianov, N., 张俞骋, Moridi, M. & Wu, L., 2023, IEEE MEMS.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  File

  • transducers 100%
  • ultrasonics 92%
  • harmonics 84%

• Dynamic Beamforming Strategy for Sidelobe Level Suppression in Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Sparse Arrays

  Da, Z., Xu, T., Moridi, M. & Savoia, A. S., 2023, IEEE International Ultrasonics Symposium (IUS) 2023.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

• Enhancing Broadband Transmission Performance of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) via Electrical Matching Network

  Xu, T., Caponi, D. & Da, Z., 2023, 2023 IEEE International Ultrasonics Symposium (IUS).

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

• Flexible Ultrasonic Transducer for RF-DATA and Energy Transmission Through the Metal Pipe

  Abbaszadeh, J., Pashchenko, V., Rauter, L. & Moridi, M., 23 Jun 2023, Transducers Conference proceedings 2023.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • Ultrasonic transducers 100%
  • Pipe 53%
  • Near field communication 49%
  • Metals 45%
  • Transponders 21%

• Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection

  Risquez, S., Redolfi, S., Fleury, C., Wulf, M., Roshanghias, A., Piot, A., Streque, J., Schmoltner, K., Dao, T. D., Puff, M. & Moridi, M., 2023, Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • silicon nitrides 100%
  • metal oxides 98%
  • transition metals 85%
  • pixels 83%
  • membranes 75%

• Large Stroke Piezo MEMS Mirror for High-Speed Fourier Transform Spectroscopy.

  Pribosek, J., Lagosh, A. & Auböck, G., Jul 2023, Transducers 2023.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • strokes 100%
  • microelectromechanical systems 86%
  • mirrors 63%
  • spectroscopic analysis 54%
  • pistons 48%

• Micromachined optical scanner using acoustic radiation force

  Sasaki, T., Takahashi, Y. & Hane, K., Jul 2023, Micromachined optical scanner using acoustic radiation force. p. TS-TUE-02-03

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

• MULTIMODE MEMS MIRROR FOR HOMOGENEOUS ILLUMINATION IN RESONANT SCANNING OPERATION

  Bainschab, M., Tumolin Rocha, R., Fleury, C., Sasaki, T., Rodrigues Palma Guerreiro, S., Lagosh, A. & Piot, A., Jun 2023, MULTIMODE MEMS MIRROR FOR HOMOGENEOUS ILLUMINATION IN RESONANT SCANNING OPERATION. p. W4P.007

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

• On-chip photoacoustic transducer based on monolithic integration of piezoelectric micromachined ultrasonic transducers and metasurface lenses

  Zhai, Y., Sasaki, T., Moridi, M., Lin, R., Alnakhli, Z., Shamim, A., Li, X., Younis, M., Hane, K. & Wu, L., 2023, SPIE. p. 12379 - 12382 4 p.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

• PIEZOELECTRICALLY ACTUATED MICROMIRROR WITH DYNAMIC DEFORMATION COMPENSATION MECHANISM

  Sasaki, T., Piot, A., Pribosek, J., Lagosh, A., Fleury, C., Bainschab, M., Zhai, Y., Baumgart, M., Rodrigues Palma Guerreiro, S., Holzmann, D., Travnik, A. & Moridi, M., 2 Jan 2023, IEEE MEMS 2023. p. 1123 4 p.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

• RESONANT d33 MODE PZT MEMS MIRROR EXCITED WITH DIRECTIONAL INTERDIGITATED ELECTRODES

  Thakkar, P., Lagosh, A., Sasaki, T., Bainschab, M. & Pribosek, J., 2 Jan 2023, IEEE MEMS 2023. p. 1127 4 p.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

• Resonant Piezoelectric Varifocal Mirror with on-Chip Integrated Diffractive Optics for Increased Frequency Response

  Pribosek, J., Lagosh, A., Thakkar, P., Sasaki, T. & Bainschab, M., 1 Mar 2023, 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • diffractive optics 100%
  • frequency response 71%
  • chips 59%
  • mirrors 53%
  • membranes 36%

• Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators

  Terzic, T., Andrianov, N., Chouiki, M., Solonenko, D., De Pastina, A., Pashchenko, V. & Risquez, S., 2 Oct 2023, 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP).

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  Open Access

  • etching 100%
  • resonators 99%
  • scandium 84%
  • acoustics 76%
  • microelectromechanical systems 64%
• 2022

  Acoustofluidic Particle Focusing in PMMA Chips Using Low Frequency Lateral Resonances of The Piezoelectric Plate Transducer

  Fuchsluger, K., Ecker, K., De Pastina, A., Andrianov, N., Cselyuszka, N., Moridi, M. & Jakoby, B., 2022, 48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES) .

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • transducers 100%
  • chips 97%
  • low frequencies 86%
  • harmonics 84%
  • modes (standing waves) 49%

• A novel approach to characterize the sodium contamination caused by gas filling during anodic bonding

  张俞骋, Solazzi, F., Cselyuszka, N., Sorschag, K., Andrianov, N., Bauscher, M., Schiffer, M., Lang, K-D., Moridi, M. & Schneider-Ramelow, M., 2022, Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS. p. 1 5 p.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • contamination 100%
  • sodium 99%
  • gases 57%
  • deviation 53%
  • resistors 38%

• Detachable Ultrasonic Data Communication Through the Metal plate with NFC Technology

  Abbaszadeh, J., Pashchenko, V., Gebhart, M., Travnik, A., Bardong, J. & Moridi, M., 10 Oct 2022, 2022 IEEE International Ultrasonics Symposium (IUS).

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • Near field communication 100%
  • Plate metal 93%
  • Ultrasonics 60%
  • Metals 45%
  • Lead zirconate titanate 43%

• Measuring angle-resolved dynamic deformation of micromirrors with digital stroboscopic holography

  Thakkar, P., Fleury, C., Bainschab, M., Sasaki, T., Zauner, M., Holzmann, D., Piot, A. & Pribosek, J., 20 May 2022, Optics and Photonics for Advanced Dimensional Metrology II. Vol. 12137 . p. 112-119

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

  • holography 100%
  • harmonics 40%
  • hysteresis 34%
  • gimbals 22%
  • mirrors 20%

• On-chip integrated lateral and vertical tunable metasurfaces for 3D imaging

  Zhai, Y., Sasaki, T., Moridi, M., Lin, R., Alnakhli, Z., Wu, L., Shamim, A., Li, X., Younis, M. & Hane, K., 2022, MNE-ES2022 .

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • production cost 100%
  • trade-off 88%
  • tomography 74%
  • probe 69%
  • consumption 59%

• Through-Wall Acoustically Linked Temperature Sensor

  Pashchenko, V., Abbaszadeh, J., Travnik, A., Bardong, J. & Moridi, M., 10 Oct 2022, 2022 IEEE International Ultrasonics Symposium (IUS). p. 1-4 4 p.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • temperature sensors 100%
  • temperature measurement 81%
  • transducers 72%
  • thermistors 57%
  • wall temperature 52%

• ULTRA-FAST ACOUSTOFLUIDIC PARTICLE FOCUSING USING LATERAL MODES OF A PLATE TRANSDUCER

  Fuchsluger, A., De Pastina, A., Mitteramskogler, T., Ecker, R., Voglhuber-Brunnmaier, T., Andrianov, N., Shatalov, A., Cselyuszka, N., Moridi, M. & Jakoby, B., 2022, (Accepted/In press) Transducers 2023: The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems. Kyoto

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • transducers 100%
  • heat generation 72%
  • holders 68%
  • actuation 64%
  • flux density 49%

• Utilizing Lateral Plate Transducer Modes for High Quality Acoustofluidics in Silicon-Based Chips

  Fuchsluger, K., De Pastina, A., Nikolai, A., Roshanghias, A., Cselyuszka, N., Mitteramskogler, K., Ecker, K., Moridi, M. & Jakoby, B., 2022, Utilizing Lateral Plate Transducer Modes for High Quality Acoustofluidics in Silicon-Based Chips. p. 1 4 p.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  Open Access

  • transducers 100%
  • chips 97%
  • silicon 66%
  • heat generation 36%
  • holders 34%
• 2021

  Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT

  Piot, A., Pribošek, J. & Moridi, M., 29 Jan 2021, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). p. 89-92 4 p. 9375326

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

  • barium 100%
  • microelectromechanical systems 94%
  • pulsed lasers 83%
  • mirrors 69%
  • pulsed laser deposition 61%
• 2019

  Free oscillation frequency of IPMC actuator as an indicator of its water content

  Kalyonov, V. E., Alekseev, N. I., Khmelnitskiy, I. K., Lagosh, A. V. & Broyko, A. P., 2019, Proceedings of the 2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering, ElConRus 2019.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

• PEDOT and PANI electrodes for IP2C actuators

  Khmelnitskiy, I. K., Aivazyan, V. M., Andryukhin, K. A., Lagosh, A. V. & Kalyonov, V. E., 2019, Proceedings of the 2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering, ElConRus 2019.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

• Producing and investigation of PEDOT films as electrodes of ionic electroactive actuators

  Khmelnitskiy, I. K., Aivazyan, V. M., Alekseev, N. I., Broyko, A. P., Golubkov, V. A., Testov, D. O., Lagosh, A. V. & Kalyonov, V. E., 2019, Journal of Physics: Conference Series. 1281 012033

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

• Producing and investigation of radiation-absorbent coatings based on conductive polymers

  Gareev, K. G., Khmelnitskiy, I. K., Aivazyan, V. M., Golubkov, V. A., Ivanitsa, M. G., Kunitsyn, A. S., Lagosh, A. V., Mikhailova, O. N., Reinyuk, A. V., Testov, D. O., Testov, I. O. & Testov, O. A., 2019, Journal of Physics: Conference Series.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

• Walking Robot with Propulsors Based on IPMC Actuators

  Kalyonov, V. E., Orekhov, Y. D., Khmelnitskiy, I. K., Alekseev, N. I., Broyko, A. P., Lagosh, A. V., Testov, D. O. & Shpakovsky, A. D., 2019, Proceedings of the 2019 IEEE International Conference on Electrical Engineering and Photonics, EExPolytech 2019.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review
• 2018

  Amino-functionalized graphene electrodes in ionic polymer actuators

  Khmelnitsky, I. K., Alekseyev, N. I., Vereschagina, L. O., Broyko, A. P., Lagosh, A. V., Kaleonov, V. E. & Bagrec, V. S., 2018, AIP Conference Proceedings. 1 ed. Vol. 2041. 020011

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

• Graphene in electroactive polymer membranes and in electrode membranes of biomimetic systems. Simulation and search for optimal technology

  Alekseev, N. I., Broyko, A. P., Evseev, Z. I., Kaleonov, V. E., Khmelnitsky, I. K., Korlyakov, A. V., Lagosh, A. V., Luchinin, V. V. & Smagulova, S. A., 2018, AIP Conference Proceedings.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

• Soft ionic electroactive polymer actuators and sensors with graphene/polyaniline nanocomposite electrodes

  Khmelnitskiy, I. K., Livshits, A. O., Alekseyev, N. I., Lagosh, A. V. & Dyachkova, T. P., 2018, Proceedings of the 2018 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering, ElConRus 2018.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review
• 2017

  Design and technology optimization of SiC-based RF MEMS switch

  Lagosh, A. V. & Korlyakov, A. V., 2017, Journal of Physics: Conference Series. 917 082007

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

• Improvement of manufacture technology and investigation of IPMC actuator electrodes

  Khmelnitskiy, I. K., Vereschagina, L. O., Kalyonov, V. E., Lagosh, A. V. & Broyko, A. P., 2017, Proceedings of the 2017 IEEE Russia Section Young Researchers in Electrical and Electronic Engineering Conference, ElConRus 2017.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

• Improvement of manufacture technology and research of actuators based on ionic polymer-metal composites

  Khmelnitskiy, I. K., Vereshagina, L. O., Kalyonov, V. E., Broyko, A. P., Lagosh, A. V., Luchinin, V. V. & Testov, D. O., 2017, Journal of Physics: Conference Series.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

• Research of mechanical stresses in micromechanical structures based on silicon carbide films produced by magnetron sputtering

  Mikhailova, O. N., Korlyakov, A. V. & Lagosh, A. V., 2017, Journal of Physics: Conference Series.

  Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review