Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT

Adrien Piot, Jaka Pribošek, Mohssen Moridi

    Research output: Conference proceeding/Chapter in Book/Report/Conference Paperpeer-review

    Abstract

    In this paper, we report the design, microfabrication and characterizations of a dual-axis MEMS mirror based on an unconventional Ba-doped PZT piezo thin-film produced using pulsed laser deposition. The mirror features three resonant modes: one low frequency bending mode at 490 Hz and two high frequency torsional modes at 9 kHz and 25 kHz both excited with a dog-bone shaped actuator. Excited at 2Vpp and 5Vpp, the optical scan angle of 15.5° and 6° was measured for slow and fast axis respectively. We show that the obtained results are comparable to the state-of-the art using classical sol-gel deposition, demonstrating high potential of using pulsed laser deposition for PZT MEMS devices.
    Original languageEnglish
    Title of host publication2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
    Pages89-92
    Number of pages4
    DOIs
    Publication statusPublished - 29 Jan 2021
    Event2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) - Gainesville, FL, USA
    Duration: 25 Jan 202129 Jan 2021

    Conference

    Conference2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
    Period25/01/2129/01/21

    Keywords

    • Micromechanical devices
    • Resonant frequency
    • Optical variables measurement
    • Laser modes
    • Pulsed laser deposition
    • Laser excitation
    • Mirrors

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