Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT

Adrien Piot; Jaka Pribošek; Mohssen Moridi

doi:10.1109/MEMS51782.2021.9375326

Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT

Adrien Piot, Jaka Pribošek, Mohssen Moridi

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Abstract

In this paper, we report the design, microfabrication and characterizations of a dual-axis MEMS mirror based on an unconventional Ba-doped PZT piezo thin-film produced using pulsed laser deposition. The mirror features three resonant modes: one low frequency bending mode at 490 Hz and two high frequency torsional modes at 9 kHz and 25 kHz both excited with a dog-bone shaped actuator. Excited at 2Vpp and 5Vpp, the optical scan angle of 15.5° and 6° was measured for slow and fast axis respectively. We show that the obtained results are comparable to the state-of-the art using classical sol-gel deposition, demonstrating high potential of using pulsed laser deposition for PZT MEMS devices.

Original language	English
Title of host publication	2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Pages	89-92
Number of pages	4
DOIs	https://doi.org/10.1109/MEMS51782.2021.9375326
Publication status	Published - 29 Jan 2021
Event	2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) - Gainesville, FL, USA Duration: 25 Jan 2021 → 29 Jan 2021

Conference

Conference	2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Period	25/01/21 → 29/01/21

Keywords

Micromechanical devices
Resonant frequency
Optical variables measurement
Laser modes
Pulsed laser deposition
Laser excitation
Mirrors

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10.1109/MEMS51782.2021.9375326

https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9375326

Cite this

@inproceedings{60f6b251f5bb4f85b484f2658a6be696,

title = "Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT",

abstract = "In this paper, we report the design, microfabrication and characterizations of a dual-axis MEMS mirror based on an unconventional Ba-doped PZT piezo thin-film produced using pulsed laser deposition. The mirror features three resonant modes: one low frequency bending mode at 490 Hz and two high frequency torsional modes at 9 kHz and 25 kHz both excited with a dog-bone shaped actuator. Excited at 2Vpp and 5Vpp, the optical scan angle of 15.5° and 6° was measured for slow and fast axis respectively. We show that the obtained results are comparable to the state-of-the art using classical sol-gel deposition, demonstrating high potential of using pulsed laser deposition for PZT MEMS devices.",

keywords = "Micromechanical devices, Resonant frequency, Optical variables measurement, Laser modes, Pulsed laser deposition, Laser excitation, Mirrors",

author = "Adrien Piot and Jaka Pribo{\v s}ek and Mohssen Moridi",

year = "2021",

month = jan,

day = "29",

doi = "10.1109/MEMS51782.2021.9375326",

language = "English",

isbn = "978-1-6654-3024-1",

pages = "89--92",

booktitle = "2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)",

note = "2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) ; Conference date: 25-01-2021 Through 29-01-2021",

}

Piot, A , Pribošek, J & Moridi, M 2021, Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT. in 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)., 9375326, pp. 89-92, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), 25/01/21. https://doi.org/10.1109/MEMS51782.2021.9375326

TY - GEN

T1 - Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT

AU - Piot, Adrien

AU - Pribošek, Jaka

AU - Moridi, Mohssen

PY - 2021/1/29

Y1 - 2021/1/29

N2 - In this paper, we report the design, microfabrication and characterizations of a dual-axis MEMS mirror based on an unconventional Ba-doped PZT piezo thin-film produced using pulsed laser deposition. The mirror features three resonant modes: one low frequency bending mode at 490 Hz and two high frequency torsional modes at 9 kHz and 25 kHz both excited with a dog-bone shaped actuator. Excited at 2Vpp and 5Vpp, the optical scan angle of 15.5° and 6° was measured for slow and fast axis respectively. We show that the obtained results are comparable to the state-of-the art using classical sol-gel deposition, demonstrating high potential of using pulsed laser deposition for PZT MEMS devices.

AB - In this paper, we report the design, microfabrication and characterizations of a dual-axis MEMS mirror based on an unconventional Ba-doped PZT piezo thin-film produced using pulsed laser deposition. The mirror features three resonant modes: one low frequency bending mode at 490 Hz and two high frequency torsional modes at 9 kHz and 25 kHz both excited with a dog-bone shaped actuator. Excited at 2Vpp and 5Vpp, the optical scan angle of 15.5° and 6° was measured for slow and fast axis respectively. We show that the obtained results are comparable to the state-of-the art using classical sol-gel deposition, demonstrating high potential of using pulsed laser deposition for PZT MEMS devices.

KW - Micromechanical devices

KW - Resonant frequency

KW - Optical variables measurement

KW - Laser modes

KW - Pulsed laser deposition

KW - Laser excitation

KW - Mirrors

UR - https://ieeexplore.ieee.org/document/9375326/

U2 - 10.1109/MEMS51782.2021.9375326

DO - 10.1109/MEMS51782.2021.9375326

M3 - Conference Paper

SN - 978-1-6654-3024-1

SP - 89

EP - 92

BT - 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

T2 - 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

Y2 - 25 January 2021 through 29 January 2021

ER -

Dual-Axis Resonant Scanning MEMS Mirror with Pulsed-Laser-Deposited Barium-Doped PZT

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