Research of mechanical stresses in micromechanical structures based on silicon carbide films produced by magnetron sputtering

O.N. Mikhailova, A.V. Korlyakov, A.V. Lagosh

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Original language	Undefined/Unknown
Title of host publication	Journal of Physics: Conference Series
DOIs	https://doi.org/10.1088/1742-6596/872/1/012043
Publication status	Published - 2017

Access to Document

@inproceedings{87df2c2415f14f529a1c1e1e3e82bd92,

title = "Research of mechanical stresses in micromechanical structures based on silicon carbide films produced by magnetron sputtering",

author = "O.N. Mikhailova and A.V. Korlyakov and A.V. Lagosh",

year = "2017",

doi = "10.1088/1742-6596/872/1/012043",

language = "undefiniert/unbekannt",

booktitle = "Journal of Physics: Conference Series",

}

TY - GEN

T1 - Research of mechanical stresses in micromechanical structures based on silicon carbide films produced by magnetron sputtering

AU - Mikhailova, O.N.

AU - Korlyakov, A.V.

AU - Lagosh, A.V.

PY - 2017

Y1 - 2017

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85025825472&partnerID=MN8TOARS

U2 - 10.1088/1742-6596/872/1/012043

DO - 10.1088/1742-6596/872/1/012043

M3 - Konferenzartikel

BT - Journal of Physics: Conference Series

ER -