On-chip integrated lateral and vertical tunable metasurfaces for 3D imaging

This paper presents a dynamically tunable metasurface that can be used for 3D imaging. As far as we know, this is the first report on a metasurface that can be disassembled and assembled and dynamically adjusted horizontally and vertically. This not only greatly simplifies the trade-off between lateral resolution and focal depth, but also greatly reduces the production cost of optical probes, especially the micromirror matrix series for Optical coherence tomography and photoacoustic imaging in the medical field.
An integrated tracking focusing lens actuator composed of a spring, a comb drive, and a lens holder is designed to realize the two-dimensional tuning effect of the objective lens. Combined with electrostatic actuation, it has the advantages of fast response time, low power consumption, and large displacement [3], so it can be used on-chip, integrated, fast 3D imaging results.