Dual-frequency piezoelectric micromachined ultrasonic transducers for fundamental and harmonic imaging

Yanfen Zhai, Waleed Maqsood, Zhou Da, Nikolai Andrianov, 张 俞骋, Mohssen Moridi, Lixiang Wu

Research output: Conference proceeding/Chapter in Book/Report/Conference Paperpeer-review

Abstract

This paper reports a piezoelectric micromachined ultrasonic transducer (PMUT) with favorable fundamental and
harmonic (from 2nd to 5th) frequency bands, which has recently been verified, for the first time, by experiments on
fundamental and harmonic imaging with single PMUT element. The dual-frequency PMUT doubles the fractional
bandwidth and halves the device dimensions compared to state of the art, which will enable the implementation of
large PMUT arrays for intravascular ultrasound (IVUS) harmonic imaging applications.
Original languageEnglish
Title of host publicationIEEE MEMS
Publication statusPublished - 2023

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