Abstract
This paper reports a piezoelectric micromachined ultrasonic transducer (PMUT) with favorable fundamental and
harmonic (from 2nd to 5th) frequency bands, which has recently been verified, for the first time, by experiments on
fundamental and harmonic imaging with single PMUT element. The dual-frequency PMUT doubles the fractional
bandwidth and halves the device dimensions compared to state of the art, which will enable the implementation of
large PMUT arrays for intravascular ultrasound (IVUS) harmonic imaging applications.
harmonic (from 2nd to 5th) frequency bands, which has recently been verified, for the first time, by experiments on
fundamental and harmonic imaging with single PMUT element. The dual-frequency PMUT doubles the fractional
bandwidth and halves the device dimensions compared to state of the art, which will enable the implementation of
large PMUT arrays for intravascular ultrasound (IVUS) harmonic imaging applications.
Original language | English |
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Title of host publication | IEEE MEMS |
Publication status | Published - 2023 |