MULTIMODE MEMS MIRROR FOR HOMOGENEOUS ILLUMINATION IN RESONANT SCANNING OPERATION

Markus Bainschab; Rodrigo Tumolin Rocha; Clément Fleury; Takashi Sasaki; Sara Rodrigues Palma Guerreiro; Anton Lagosh; Adrien Piot

MULTIMODE MEMS MIRROR FOR HOMOGENEOUS ILLUMINATION IN RESONANT SCANNING OPERATION

Markus Bainschab, Rodrigo Tumolin Rocha, Clément Fleury, Takashi Sasaki, Sara Rodrigues Palma Guerreiro, Anton Lagosh, Adrien Piot

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	English
Title of host publication	MULTIMODE MEMS MIRROR FOR HOMOGENEOUS ILLUMINATION IN RESONANT SCANNING OPERATION
Pages	W4P.007
Publication status	Published - Jun 2023
Event	Transducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems) - Kyoto International Conference Center, Kyoto, Japan Duration: 25 Jun 2023 → 29 Jun 2023 https://www.transducers2023.org/

Conference

Conference	Transducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems)
Abbreviated title	Transducers 2023
Country/Territory	Japan
City	Kyoto
Period	25/06/23 → 29/06/23
Internet address	https://www.transducers2023.org/

Cite this

@inproceedings{ff80eff4903943ce94f58f3efc600751,

title = "MULTIMODE MEMS MIRROR FOR HOMOGENEOUS ILLUMINATION IN RESONANT SCANNING OPERATION",

author = "Markus Bainschab and {Tumolin Rocha}, Rodrigo and Cl{\'e}ment Fleury and Takashi Sasaki and {Rodrigues Palma Guerreiro}, Sara and Anton Lagosh and Adrien Piot",

year = "2023",

month = jun,

language = "English",

pages = "W4P.007",

booktitle = "MULTIMODE MEMS MIRROR FOR HOMOGENEOUS ILLUMINATION IN RESONANT SCANNING OPERATION",

note = "Transducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems), Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",

url = "https://www.transducers2023.org/",

}

Bainschab, M, Tumolin Rocha, R , Fleury, C , Sasaki, T , Rodrigues Palma Guerreiro, S , Lagosh, A & Piot, A 2023, MULTIMODE MEMS MIRROR FOR HOMOGENEOUS ILLUMINATION IN RESONANT SCANNING OPERATION. in MULTIMODE MEMS MIRROR FOR HOMOGENEOUS ILLUMINATION IN RESONANT SCANNING OPERATION. pp. W4P.007, Transducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems), Kyoto, Japan, 25/06/23.

TY - GEN

T1 - MULTIMODE MEMS MIRROR FOR HOMOGENEOUS ILLUMINATION IN RESONANT SCANNING OPERATION

AU - Bainschab, Markus

AU - Tumolin Rocha, Rodrigo

AU - Fleury, Clément

AU - Sasaki, Takashi

AU - Rodrigues Palma Guerreiro, Sara

AU - Lagosh, Anton

AU - Piot, Adrien

PY - 2023/6

Y1 - 2023/6

M3 - Conference Paper

SP - W4P.007

BT - MULTIMODE MEMS MIRROR FOR HOMOGENEOUS ILLUMINATION IN RESONANT SCANNING OPERATION

T2 - Transducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems)

Y2 - 25 June 2023 through 29 June 2023

ER -