PIEZOELECTRICALLY ACTUATED MICROMIRROR WITH DYNAMIC DEFORMATION COMPENSATION MECHANISM

Takashi Sasaki; Adrien Piot; Jaka Pribosek; Anton Lagosh; Clément Fleury; Markus Bainschab; Yanfen Zhai; Marcus Baumgart; Sara Rodrigues Palma Guerreiro; Dominik Holzmann; Ales Travnik; Mohssen Moridi

PIEZOELECTRICALLY ACTUATED MICROMIRROR WITH DYNAMIC DEFORMATION COMPENSATION MECHANISM

Takashi Sasaki, Adrien Piot, Jaka Pribosek, Anton Lagosh, Clément Fleury, Markus Bainschab, Yanfen Zhai, Marcus Baumgart, Sara Rodrigues Palma Guerreiro, Dominik Holzmann, Ales Travnik, Mohssen Moridi

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	English
Title of host publication	IEEE MEMS 2023
Pages	1123
Number of pages	4
Publication status	Published - 2 Jan 2023

Cite this

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title = "PIEZOELECTRICALLY ACTUATED MICROMIRROR WITH DYNAMIC DEFORMATION COMPENSATION MECHANISM",

author = "Takashi Sasaki and Adrien Piot and Jaka Pribosek and Anton Lagosh and Cl{\'e}ment Fleury and Markus Bainschab and Yanfen Zhai and Marcus Baumgart and {Rodrigues Palma Guerreiro}, Sara and Dominik Holzmann and Ales Travnik and Mohssen Moridi",

year = "2023",

month = jan,

day = "2",

language = "English",

pages = "1123",

booktitle = "IEEE MEMS 2023",

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TY - GEN

T1 - PIEZOELECTRICALLY ACTUATED MICROMIRROR WITH DYNAMIC DEFORMATION COMPENSATION MECHANISM

AU - Sasaki, Takashi

AU - Piot, Adrien

AU - Pribosek, Jaka

AU - Lagosh, Anton

AU - Fleury, Clément

AU - Bainschab, Markus

AU - Zhai, Yanfen

AU - Baumgart, Marcus

AU - Rodrigues Palma Guerreiro, Sara

AU - Holzmann, Dominik

AU - Travnik, Ales

AU - Moridi, Mohssen

PY - 2023/1/2

Y1 - 2023/1/2

M3 - Conference Paper

SP - 1123

BT - IEEE MEMS 2023

ER -