Research output per year
Research output per year
Personal profile
Education/Academic qualification
Plasma Based Processes in III-N HEMT technology, Peter the Great St. Petersburg Polytechnic University
1 Sept 2010 → 1 Sept 2014
Award Date: 13 Dec 2018
PhD, Plasma based Process in III-N HEMT technology, Peter the Great St. Petersburg Polytechnic University
1 Sept 2010 → 1 Sept 2014
Award Date: 13 Dec 2018
Keywords
- QC Physics
- Plasma Chemistry
- Gas Discharge
- Thin Films
- III-N
- Micro Fabrication
- Plasma Processing
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Collaborations and top research areas from the last five years
Recent external collaboration on country/territory level. Dive into details by clicking on the dots or
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Aluminum nitride on insulator: Material and processing optimization for integrated photonic applications
Spettel, J., Andrianov, N., Dubois, F., Furci, H., Cassese, T., Liffredo, M., Villanueva, L. G., Quack, N., Moridi, M. & Dao, T. D., 2023, EPJ Web of Conferences. Vol. 287.Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper
Open Access -
Dual-frequency piezoelectric MEMS microphones based on AlSc 30% N thin films for aeroacoustic measurements
Wu, L., Zhai, Y., Lokesh, O., Bourquard, C., Abbaszadeh, J., Andrianov, N., Garcia souto, J. A., Nguyen, T. A. T., Chen, X., Erbacher, K., Ngo, H-D., Sainges, O. & Julliard, E., 8 Jun 2023.Research output: Contribution to conference (No Proceedings) › Paper › peer-review
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Dual-frequency piezoelectric micromachined ultrasonic transducers for fundamental and harmonic imaging
Zhai, Y., Maqsood, W., Da, Z., Andrianov, N., 张俞骋, Moridi, M. & Wu, L., 2023, IEEE MEMS.Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review
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Efficient Xe Filling of MEMS Vapor Cells Empowered by Customized Triple Stack Wafer Bond Processing
Roshanghias, A., Kaczynski, J., Rodrigues, A., Hübner, M., Zauner, M., Grosso, G., Andrianov, N., Khan, M., Grömer, T., Fuchs, T. & Binder, A., 29 Sept 2023, In: ECS Transactions.Research output: Contribution to journal › Article › peer-review
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Engineering Light with Mid-Infrared Metasurfaces for Sensing and Imaging Applications
Dao, T. D., Andrianov, N., Chouiki, M., Azeem, S. M., Spettel, J., Dubois, F., Fleury, C., Pilz, J., Moridi, M. & Vojkuvka, L., Jul 2023.Research output: Contribution to conference (No Proceedings) › Paper › peer-review
Open Access
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The Effect of CH4/H2 Gas Admixture on the Selectivity towards Pt in Dry Etching of PZT Thin-Films by ICP-RIE
Madeleine Petschnigg (Speaker), Nikolai Andrianov (Speaker), Syed Munir Azeem (Speaker) & Susan Trolier-McKinstry (Speaker)
9 Nov 2023Activity: Talk or presentation › Poster Presentation
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Acoustofluidic Trapping in Structured Microchannels Using Lateral Transducer Modes
Andreas Fuchsluger (Speaker), Annalisa De Pastina (Speaker), Tina Mitteramskogler (Speaker), Rafael Ecker (Speaker), Thomas Voglhuber-Brunnmaier (Speaker), Nikolai Andrianov (Speaker), Alexander Shatalov (Speaker), Norbert Cselyuszka (Speaker), Mohssen Moridi (Speaker) & Bernhard Jakoby (Speaker)
Oct 2023Activity: Talk or presentation › Oral presentation
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Concept and Proof of Principle of an Acoustofluidic Single-Particle Sorting Device Using a Spatially Confined Acoustic Active Region
Andreas Fuchsluger (Speaker), Annalisa De Pastina (Speaker), Tina Mitteramskogler (Speaker), Rafael Ecker (Speaker), Thomas Voglhuber-Brunnmaier (Speaker), Nikolai Andrianov (Speaker), Alexander Shatalov (Speaker), Norbert Cselyuszka (Speaker), Mohssen Moridi (Speaker) & Bernhard Jakoby (Speaker)
Sept 2023Activity: Talk or presentation › Oral presentation
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Partial etching of Aluminum Scandium Nitride by Ion Beam Etching for next generation of RF MEMS Filter Applications
Tamara Terzic (Speaker), Nikolai Andrianov (Speaker), Annalisa De Pastina (Speaker) & Sarah Risquez (Speaker)
19 Jun 2023Activity: Talk or presentation › Oral presentation
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Impact of CH4/H2 Gas Admixture on Pb(Zr1-xTix)O3 ICP-RIE Etching Performance
Madeleine Petschnigg (Speaker), Sarah Risquez (Speaker), Syed Munir Azeem (Speaker), Annalisa De Pastina (Speaker), Anton Lagosh (Speaker) & Nikolai Andrianov (Speaker)
19 Jun 2023 → 20 Jun 2023Activity: Talk or presentation › Poster Presentation