Original language | English |
---|---|
Title of host publication | 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) |
DOIs | |
Publication status | Published - 22 Jan 2024 |
Two-Dimensional Piezoelectrically Actuated Micromirror with Fast Focusing Function
Takashi Sasaki, Adrien Piot, Clément Fleury, Sara Rodrigues Palma Guerreiro, Rodrigo Tumolin Rocha, Anton Lagosh
Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper