Original language | English |
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Title of host publication | IEEE MEMS 2023 |
Pages | 1127 |
Number of pages | 4 |
Publication status | Published - 2 Jan 2023 |
RESONANT d33 MODE PZT MEMS MIRROR EXCITED WITH DIRECTIONAL INTERDIGITATED ELECTRODES
Pooja Thakkar, Anton Lagosh, Takashi Sasaki, Markus Bainschab, Jaka Pribosek
Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper