Research output per year
Research output per year
Search results
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2023
A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors
Fleury, C., Bainschab, M., Carminati, R., Mendicino, G., Thakkar, P., Holzmann, D., Rodrigues Palma Guerreiro, S. & Piot, A., 2023.Research output: Contribution to conference (No Proceedings) › Paper
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Acoustofluidic Trapping in Structured Microchannels Using Lateral Transducer Modes
Fuchsluger, A., De Pastina, A., Mitteramskogler, T., Ecker, R., Voglhuber-Brunnmaier, T., Andrianov, N., Shatalov, A., Cselyuszka, N., Moridi, M. & Jakoby, B., Nov 2023.Research output: Contribution to conference (No Proceedings) › Paper › peer-review
Open Access -
C4.4 - Characterization of a Piezo-Resistive MEMS Microphone for Aero-Acoustic Measurements
Erbacher, K., Bourquard, C., Lokesh, O., Wu, L., Mackowiak, P., Schneider-Ramelow, M. & Ngo, H., 2023, p. 171-172.Research output: Contribution to conference (No Proceedings) › Paper › peer-review
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Optical and Environmental Characterization Bench for 2D Micromirrors
Rodrigues Palma Guerreiro, S., Bainschab, M., Piot, A., Rocha, R. T., Toshiyoshi, H., Bosseboeuf, A., Sasaki, T., Lagosh, A. & Moridi, M., 28 May 2023, p. 1-6.Research output: Contribution to conference (No Proceedings) › Paper › peer-review
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Unfolding the Future with Smart Road Lighting and Sensing
Piot, A., Travnik, A., Bainschab, M., Fleury, C., Sasaki, T., Rodrigues Palma Guerreiro, S., Baumgart, M., Holzmann, D., Rocha, R. T., Lagosh, A. & Moridi, M., 2023, p. 1-2.Research output: Contribution to conference (No Proceedings) › Paper › peer-review
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2022
Chemically enhanced dry etching of Al0.7Sc0.3N for MEMS applications
Andrianov, N., De Pastina, A., Risquez, S. & Moridi, M., 21 Sept 2022.Research output: Contribution to conference (No Proceedings) › Paper › peer-review
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2021
Broadband MEMS Shutter Based Variable Optical Attenuator
Lagosh, A., Guldimann, B., Huszka, G., Sattari, H., Ahlers, B., Giaccari, P., Kerr, G., Rahnama, P., Nishizawa, T. & Quack, N., Nov 2021.Research output: Contribution to conference (No Proceedings) › Paper › peer-review
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Smart slit assembly employing continuously tunable MEMS shutter
Lagosh, A., Huszka, G., Sattari, H., Ahlers, B., Guldimann, B., Kerr, G., Melozzi, M., Rahnama, P., Nishizawa, T. & Quack, N., 5 Mar 2021, p. 116970P.Research output: Contribution to conference (No Proceedings) › Paper › peer-review