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Piezoelectric Microsystem Technologies (PMT)
Microsystems
Email
Anton.Lagosh@silicon-austria.com
Overview
Fingerprint
Network
Profiles
(18)
Projects
(2)
Research output
(68)
Activities
(22)
Research output
Research output per year
2017
2022
2023
2024
37
Conference Paper
11
Article
8
Paper
8
Poster
4
More
2
Abstract
1
Review article
1
Patent
Research output per year
Research output per year
1 results
Publication Year, Title
(descending)
Publication Year, Title
(ascending)
Title
Type
Filter
Review article
Search results
2023
Varifocal MEMS mirrors for high-speed axial focus scanning: a review
Pribosek, J.
,
Bainschab, M.
&
Sasaki, T.
,
27 Oct 2023
,
In:
Microsystems and Nanoengineering.
9
,
135
Research output
:
Contribution to journal
›
Review article
›
peer-review
Open Access
Figure of Merit
100%
microelectromechanical systems
84%
MEMS
80%
Fuel
71%
Scanning
67%