Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection

Sarah Risquez; Sebastian Redolfi; Clément Fleury; Matthias Wulf; Ali Roshanghias; Adrien Piot; Jeremy Streque; Kerstin Schmoltner; Thang Duy Dao; Markus Puff; Mohssen Moridi

doi:10.1109/MEMS49605.2023.10052556

Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection

Sarah Risquez, Sebastian Redolfi, Clément Fleury, Matthias Wulf, Ali Roshanghias, Adrien Piot, Jeremy Streque, Kerstin Schmoltner, Thang Duy Dao, Markus Puff, Mohssen Moridi

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Abstract

In this paper, we report the integration of a non-CMOS transition metal oxide composite thin film with a high negative temperature coefficient resistance (NTCR) of 3.8 %/K on a silicon nitride membrane for uncooled infrared microbolometer working in the long wavelength infrared (LWIR) region. The NTC thin film is fabricated by a chemical solution deposition process requiring high crystallization temperature (>750°C). Different micromachined silicon-nitride membrane-supported bolometers (1, 2×2 and 4×4 pixels) with a 170×170 µm 2 pixel size are successfully fabricated and packaged in a vacuum-shielded TO housing. The fabricated devices exhibit a typical noise equivalent temperature difference (NETD) value down to 15 mK×Hz -1/2 and a high specific detectivity characteristic of 1.4×10 8 cm×Hz 1/2 ×W -1 .

Original language	English
Title of host publication	Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection
DOIs	https://doi.org/10.1109/MEMS49605.2023.10052556
Publication status	Published - 2023
Event	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) - Science Congress Center Munich Walther-von-Dyck Straße 10 , 85748 Garching bei München, Germany Duration: 15 Jan 2023 → 19 Jan 2023 https://mems23.org/

Conference

Conference	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Abbreviated title	IEEE MEMS 2023
Country/Territory	Germany
City	85748 Garching bei München
Period	15/01/23 → 19/01/23
Internet address	https://mems23.org/

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10.1109/MEMS49605.2023.10052556

Cite this

Risquez, S., Redolfi, S., Fleury, C., Wulf, M., Roshanghias, A., Piot, A., Streque, J., Schmoltner, K., Dao, T. D., Puff, M., & Moridi, M. (2023). Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection. In Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection https://doi.org/10.1109/MEMS49605.2023.10052556

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title = "Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection",

abstract = "In this paper, we report the integration of a non-CMOS transition metal oxide composite thin film with a high negative temperature coefficient resistance (NTCR) of 3.8 %/K on a silicon nitride membrane for uncooled infrared microbolometer working in the long wavelength infrared (LWIR) region. The NTC thin film is fabricated by a chemical solution deposition process requiring high crystallization temperature (>750°C). Different micromachined silicon-nitride membrane-supported bolometers (1, 2×2 and 4×4 pixels) with a 170×170 µm 2 pixel size are successfully fabricated and packaged in a vacuum-shielded TO housing. The fabricated devices exhibit a typical noise equivalent temperature difference (NETD) value down to 15 mK×Hz -1/2 and a high specific detectivity characteristic of 1.4×10 8 cm×Hz 1/2 ×W -1 .",

author = "Sarah Risquez and Sebastian Redolfi and Cl{\'e}ment Fleury and Matthias Wulf and Ali Roshanghias and Adrien Piot and Jeremy Streque and Kerstin Schmoltner and Dao, {Thang Duy} and Markus Puff and Mohssen Moridi",

year = "2023",

doi = "10.1109/MEMS49605.2023.10052556",

language = "English",

booktitle = "Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection",

note = "2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), IEEE MEMS 2023 ; Conference date: 15-01-2023 Through 19-01-2023",

url = "https://mems23.org/",

}

Risquez, S, Redolfi, S, Fleury, C, Wulf, M, Roshanghias, A , Piot, A , Streque, J, Schmoltner, K, Dao, TD, Puff, M & Moridi, M 2023, Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection. in Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection. 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), 85748 Garching bei München, Bavaria, Germany, 15/01/23. https://doi.org/10.1109/MEMS49605.2023.10052556

Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection. / Risquez, Sarah; Redolfi, Sebastian; Fleury, Clément et al.
Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection. 2023.

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

TY - GEN

T1 - Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection

AU - Risquez, Sarah

AU - Redolfi, Sebastian

AU - Fleury, Clément

AU - Wulf, Matthias

AU - Roshanghias, Ali

AU - Piot, Adrien

AU - Streque, Jeremy

AU - Schmoltner, Kerstin

AU - Dao, Thang Duy

AU - Puff, Markus

AU - Moridi, Mohssen

PY - 2023

Y1 - 2023

N2 - In this paper, we report the integration of a non-CMOS transition metal oxide composite thin film with a high negative temperature coefficient resistance (NTCR) of 3.8 %/K on a silicon nitride membrane for uncooled infrared microbolometer working in the long wavelength infrared (LWIR) region. The NTC thin film is fabricated by a chemical solution deposition process requiring high crystallization temperature (>750°C). Different micromachined silicon-nitride membrane-supported bolometers (1, 2×2 and 4×4 pixels) with a 170×170 µm 2 pixel size are successfully fabricated and packaged in a vacuum-shielded TO housing. The fabricated devices exhibit a typical noise equivalent temperature difference (NETD) value down to 15 mK×Hz -1/2 and a high specific detectivity characteristic of 1.4×10 8 cm×Hz 1/2 ×W -1 .

AB - In this paper, we report the integration of a non-CMOS transition metal oxide composite thin film with a high negative temperature coefficient resistance (NTCR) of 3.8 %/K on a silicon nitride membrane for uncooled infrared microbolometer working in the long wavelength infrared (LWIR) region. The NTC thin film is fabricated by a chemical solution deposition process requiring high crystallization temperature (>750°C). Different micromachined silicon-nitride membrane-supported bolometers (1, 2×2 and 4×4 pixels) with a 170×170 µm 2 pixel size are successfully fabricated and packaged in a vacuum-shielded TO housing. The fabricated devices exhibit a typical noise equivalent temperature difference (NETD) value down to 15 mK×Hz -1/2 and a high specific detectivity characteristic of 1.4×10 8 cm×Hz 1/2 ×W -1 .

U2 - 10.1109/MEMS49605.2023.10052556

DO - 10.1109/MEMS49605.2023.10052556

M3 - Conference Paper

BT - Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection

T2 - 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

Y2 - 15 January 2023 through 19 January 2023

ER -

Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection

Abstract

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