Research output per year
Research output per year
Search results
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2023
Efficient Xe Filling of MEMS Vapor Cells Empowered by Customized Triple Stack Wafer Bond Processing
Roshanghias, A., Kaczynski, J., Rodrigues, A., Hübner, M., Zauner, M., Grosso, G., Andrianov, N., Khan, M., Grömer, T., Fuchs, T. & Binder, A., 29 Sept 2023, In: ECS Transactions.Research output: Contribution to journal › Article › peer-review
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Soft mask-based dry etching of parylene AF4 for advanced packaging applications
Bellaredj, M. L. F., Andrianov, N., Kaufhold, R. & Miskovic, G., 18 Jan 2023, p. 109. 113 p.Research output: Contribution to conference (No Proceedings) › Paper › peer-review
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2022
Adhesion evaluation of parylene AF4 to silicon and glass substrate
Sinani, T. & Miskovic, G., 4 Jul 2022, 2022 45th International Spring Seminar on Electronics Technology .Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review
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Spectroscopic ellipsometry study of parylene AF4
Solonenko, D., Petschnigg, M., Dao, T. D. & Miskovic, G., 4 Jul 2022, 2022 45th International Spring Seminar on Electronics Technology (ISSE).Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review