Optical and Environmental Characterization Bench for 2D Micromirrors

Sara Rodrigues Palma Guerreiro; Markus Bainschab; Adrien Piot; Rodrigo Tumolin Rocha; Hiroshi Toshiyoshi; Alain Bosseboeuf; Takashi Sasaki; Anton Lagosh; Mohssen Moridi

doi:10.1109/DTIP58682.2023.10267932

Optical and Environmental Characterization Bench for 2D Micromirrors

Sara Rodrigues Palma Guerreiro, Markus Bainschab, Adrien Piot, Rodrigo Tumolin Rocha, Hiroshi Toshiyoshi, Alain Bosseboeuf, Takashi Sasaki, Anton Lagosh, Mohssen Moridi

Research output: Contribution to conference (No Proceedings) › Paper › peer-review

Original language	English
Pages	1-6
DOIs	https://doi.org/10.1109/DTIP58682.2023.10267932
Publication status	Published - 28 May 2023
Event	2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) - Valetta, Malta Duration: 28 May 2023 → 31 May 2023

Conference

Conference	2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP)
Period	28/05/23 → 31/05/23

Access to Document

10.1109/DTIP58682.2023.10267932

https://ieeexplore.ieee.org/document/10267932/

Cite this

@conference{61589f6c9cb14aff8d90f54e54900793,

title = "Optical and Environmental Characterization Bench for 2D Micromirrors",

author = "{Rodrigues Palma Guerreiro}, Sara and Markus Bainschab and Adrien Piot and Rocha, {Rodrigo Tumolin} and Hiroshi Toshiyoshi and Alain Bosseboeuf and Takashi Sasaki and Anton Lagosh and Mohssen Moridi",

year = "2023",

month = may,

day = "28",

doi = "10.1109/DTIP58682.2023.10267932",

language = "English",

pages = "1--6",

note = "2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) ; Conference date: 28-05-2023 Through 31-05-2023",

}

Rodrigues Palma Guerreiro, S, Bainschab, M, Piot, A , Rocha, RT, Toshiyoshi, H, Bosseboeuf, A, Sasaki, T , Lagosh, A & Moridi, M 2023, 'Optical and Environmental Characterization Bench for 2D Micromirrors', Paper presented at 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP), 28/05/23 - 31/05/23 pp. 1-6. https://doi.org/10.1109/DTIP58682.2023.10267932

TY - CONF

T1 - Optical and Environmental Characterization Bench for 2D Micromirrors

AU - Rodrigues Palma Guerreiro, Sara

AU - Bainschab, Markus

AU - Piot, Adrien

AU - Rocha, Rodrigo Tumolin

AU - Toshiyoshi, Hiroshi

AU - Bosseboeuf, Alain

AU - Sasaki, Takashi

AU - Lagosh, Anton

AU - Moridi, Mohssen

PY - 2023/5/28

Y1 - 2023/5/28

U2 - 10.1109/DTIP58682.2023.10267932

DO - 10.1109/DTIP58682.2023.10267932

M3 - Paper

SP - 1

EP - 6

T2 - 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP)

Y2 - 28 May 2023 through 31 May 2023

ER -