A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors

Clément Fleury; Markus Bainschab; Roberto Carminati; Gianluca Mendicino; Pooja Thakkar; Dominik Holzmann; Sara Rodrigues Palma Guerreiro; Adrien Piot

A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors

Clément Fleury, Markus Bainschab, Roberto Carminati, Gianluca Mendicino, Pooja Thakkar, Dominik Holzmann, Sara Rodrigues Palma Guerreiro, Adrien Piot

Research output: Contribution to conference (No Proceedings) › Paper

Abstract

We demonstrate the experimental assessment of a high-Q, high-angle piezoelectric (2 µm PZT) MEMS scanning micromirror featuring distributed backside reinforcement, suitable for application demanding energy efficient and high-quality image projection. Frequency response measurements at 10 different vacuum levels ranging from atmospheric pressure to 10-6 mbar allow for the quantitative separation of damping mechanisms (air and structural). Stroboscopic digital holographic microscopy was used to assess the static and dynamic deformation of the mirror surface. The experimental results are in good agreement with simulations and models.

Original language	English
Publication status	Published - 2023
Event	Eurosensors 2023: XXXV CONFERENCE - Lecce, Italy, Lecce, Italy Duration: 10 Sept 2023 → 13 Sept 2023 https://www.eurosensors2023.eu/

Conference

Conference	Eurosensors 2023
Country/Territory	Italy
City	Lecce
Period	10/09/23 → 13/09/23
Internet address	https://www.eurosensors2023.eu/

Keywords

MEMS & NEMS
Optical microsystems

Cite this

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title = "A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors",

abstract = "We demonstrate the experimental assessment of a high-Q, high-angle piezoelectric (2 µm PZT) MEMS scanning micromirror featuring distributed backside reinforcement, suitable for application demanding energy efficient and high-quality image projection. Frequency response measurements at 10 different vacuum levels ranging from atmospheric pressure to 10-6 mbar allow for the quantitative separation of damping mechanisms (air and structural). Stroboscopic digital holographic microscopy was used to assess the static and dynamic deformation of the mirror surface. The experimental results are in good agreement with simulations and models.",

keywords = "MEMS & NEMS, Optical microsystems",

author = "Cl{\'e}ment Fleury and Markus Bainschab and Roberto Carminati and Gianluca Mendicino and Pooja Thakkar and Dominik Holzmann and {Rodrigues Palma Guerreiro}, Sara and Adrien Piot",

year = "2023",

language = "English",

note = "Eurosensors 2023 : XXXV CONFERENCE ; Conference date: 10-09-2023 Through 13-09-2023",

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T1 - A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors

AU - Fleury, Clément

AU - Bainschab, Markus

AU - Carminati, Roberto

AU - Mendicino, Gianluca

AU - Thakkar, Pooja

AU - Holzmann, Dominik

AU - Rodrigues Palma Guerreiro, Sara

AU - Piot, Adrien

PY - 2023

Y1 - 2023

N2 - We demonstrate the experimental assessment of a high-Q, high-angle piezoelectric (2 µm PZT) MEMS scanning micromirror featuring distributed backside reinforcement, suitable for application demanding energy efficient and high-quality image projection. Frequency response measurements at 10 different vacuum levels ranging from atmospheric pressure to 10-6 mbar allow for the quantitative separation of damping mechanisms (air and structural). Stroboscopic digital holographic microscopy was used to assess the static and dynamic deformation of the mirror surface. The experimental results are in good agreement with simulations and models.

AB - We demonstrate the experimental assessment of a high-Q, high-angle piezoelectric (2 µm PZT) MEMS scanning micromirror featuring distributed backside reinforcement, suitable for application demanding energy efficient and high-quality image projection. Frequency response measurements at 10 different vacuum levels ranging from atmospheric pressure to 10-6 mbar allow for the quantitative separation of damping mechanisms (air and structural). Stroboscopic digital holographic microscopy was used to assess the static and dynamic deformation of the mirror surface. The experimental results are in good agreement with simulations and models.

KW - MEMS & NEMS

KW - Optical microsystems

M3 - Paper

T2 - Eurosensors 2023

Y2 - 10 September 2023 through 13 September 2023

ER -

A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors

Abstract

Conference

Keywords

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Cite this