Activities per year
- 3 results
Search results
-
The Effect of CH4/H2 Gas Admixture on the Selectivity towards Pt in Dry Etching of PZT Thin-Films by ICP-RIE
Madeleine Petschnigg (Speaker), Nikolai Andrianov (Speaker), Syed Munir Azeem (Speaker) & Susan Trolier-McKinstry (Speaker)
20 Mar 2024Activity: Talk or presentation › Poster Presentation
-
The Effect of CH4/H2 Gas Admixture on the Selectivity towards Pt in Dry Etching of PZT Thin-Films by ICP-RIE
Madeleine Petschnigg (Speaker), Nikolai Andrianov (Speaker), Syed Munir Azeem (Speaker) & Susan Trolier-McKinstry (Speaker)
9 Nov 2023Activity: Talk or presentation › Poster Presentation
-
Impact of CH4/H2 Gas Admixture on Pb(Zr1-xTix)O3 ICP-RIE Etching Performance
Madeleine Petschnigg (Speaker), Sarah Risquez (Speaker), Syed Munir Azeem (Speaker), Annalisa De Pastina (Speaker), Anton Lagosh (Speaker) & Nikolai Andrianov (Speaker)
19 Jun 2023 → 20 Jun 2023Activity: Talk or presentation › Poster Presentation