The Effect of CH4/H2 Gas Admixture on the Selectivity towards Pt in Dry Etching of PZT Thin-Films by ICP-RIE

Activity: Talk or presentation › Poster Presentation

Period9 Nov 2023
Event titleAVS 69th International Symposium and Exhibition
Event typeConference
LocationPortland, United States, OregonShow on map
Degree of RecognitionInternational

Keywords

  • PZT
  • dry etching
  • selectivity
  • thin films
  • MEMS
  • oxides
  • microfabrication