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Impact of Precursor Chemistry on the Selectivity in Pb(Zr1-xTix)O3 ICP-RIE Etching
Madeleine Petschnigg (Speaker), Sarah Risquez (Speaker), Syed Munir Azeem (Speaker), Annalisa De Pastina (Speaker), Anton Lagosh (Speaker) & Nikolai Andrianov (Speaker)
13 Jun 2023Activity: Talk or presentation › Oral presentation
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RF-Sputter Deposition of Lead-based Perovskite Thin-Film Materials for MEMS Applications
Madeleine Petschnigg (Speaker)
11 Jul 2022Activity: Talk or presentation › Oral presentation