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The Effect of CH4/H2 Gas Admixture on the Selectivity towards Pt in Dry Etching of PZT Thin-Films by ICP-RIE
Petschnigg, M.
(Speaker)
Andrianov, N.
(Speaker)
Azeem, S. M.
(Speaker)
Susan Trolier-McKinstry (Speaker)
Thin Film Technologies (TFT)
SAL MicroFab
Activity
:
Talk or presentation
›
Poster Presentation
Period
20 Mar 2024
Event title
PiezoMEMS 2024
Event type
Workshop
Location
Aachen, Germany, North Rhine-Westphalia
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Degree of Recognition
International
Keywords
PZT
dry etching
selectivity
thin films
MEMS
oxides
microfabrication
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