Projects per year
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Collaborations and top research areas from the last five years
Profiles
Projects
- 1 Active
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Applied CPS: EDIH Applied Cyber Physical Systems for manufacturing, construction and automotive sectors
1/11/22 → 31/10/25
Project: Research
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Actuation And Sensing For PZT Micromirrors Using d33 Mode Directional Interdigitated Electrodes
Thakkar, P., Lagosh, A., Petschnigg, M., Holzmann, D. & Pribosek, J., 1 Nov 2023, (Accepted/In press) IEEE SENSORS 2023.Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review
Open AccessFile -
Advantages and developments of Raman spectroscopy for electroceramics
Deluca, M., Hu, H., Popov, M. N., Spitaler, J. & Dieing, T., 9 Oct 2023, In: Communications Materials.Research output: Contribution to journal › Article › peer-review
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Assessment of AF4 Parylene Cohesion/Adhesion on Si and SiO2 Substrates by Means of Pull-Off Energy
Sinani, T., Solonenko, D. & Miskovic, G., 19 Jan 2023, In: Coatings.Research output: Contribution to journal › Article › peer-review
Open AccessFile
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The Effect of CH4/H2 Gas Admixture on the Selectivity towards Pt in Dry Etching of PZT Thin-Films by ICP-RIE
Madeleine Petschnigg (Speaker), Nikolai Andrianov (Speaker), Syed Munir Azeem (Speaker) & Susan Trolier-McKinstry (Speaker)
20 Mar 2024Activity: Talk or presentation › Poster Presentation
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The Effect of CH4/H2 Gas Admixture on the Selectivity towards Pt in Dry Etching of PZT Thin-Films by ICP-RIE
Madeleine Petschnigg (Speaker), Nikolai Andrianov (Speaker), Syed Munir Azeem (Speaker) & Susan Trolier-McKinstry (Speaker)
9 Nov 2023Activity: Talk or presentation › Poster Presentation
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Impact of CH4/H2 Gas Admixture on Pb(Zr1-xTix)O3 ICP-RIE Etching Performance
Madeleine Petschnigg (Speaker), Sarah Risquez (Speaker), Syed Munir Azeem (Speaker), Annalisa De Pastina (Speaker), Anton Lagosh (Speaker) & Nikolai Andrianov (Speaker)
19 Jun 2023 → 20 Jun 2023Activity: Talk or presentation › Poster Presentation