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SAL MicroFab
Microsystems
Email
Lukas.Vojkuvka@silicon-austria.com
Overview
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Profiles
(13)
Research output
(19)
Activities
(10)
Research output
Research output per year
2022
2022
2023
2023
7
Conference Paper
5
Poster
4
Paper
2
Article
1
More
1
Abstract
Research output per year
Research output per year
2 results
Publication Year, Title
(descending)
Publication Year, Title
(ascending)
Title
Type
Filter
Article
Search results
2023
Efficient Xe Filling of MEMS Vapor Cells Empowered by Customized Triple Stack Wafer Bond Processing
Roshanghias, A.
,
Kaczynski, J.
,
Rodrigues, A.
,
Hübner, M.
,
Zauner, M.
,
Grosso, G.
,
Andrianov, N.
,
Khan, M.
,
Grömer, T.
,
Fuchs, T.
&
Binder, A.
,
29 Sept 2023
,
In:
ECS Transactions.
Research output
:
Contribution to journal
›
Article
›
peer-review
gyroscopes
100%
microelectromechanical systems
87%
vapors
68%
wafers
68%
nuclear magnetic resonance
54%
Highly Selective Plasma Etching Technique for Molybdenum: Highly Selective Plasma Etching Technique for Molybdenum
Osipov, A.
,
Andrianov, N.
,
Speshilova, A.
,
Gagaeva, A.
,
Risquez, S.
,
Vorobyev, A.
&
Alexandrov, S.
,
18 Feb 2023
,
In:
Plasma Chemistry and Plasma Processing.
p. 1-11
11 p.
Research output
:
Contribution to journal
›
Article
›
peer-review
Open Access
Plasma etching
100%
Molybdenum
78%
plasma etching
75%
Etching
72%
molybdenum
66%