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SAL MicroFab
Microsystems
Email
Lukas.Vojkuvka@silicon-austria.com
Overview
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Network
Profiles
(13)
Research output
(19)
Activities
(10)
Research output
Research output per year
2022
2022
2023
2023
7
Conference Paper
5
Poster
4
Paper
2
Article
1
More
1
Abstract
Research output per year
Research output per year
2 results
Title
(ascending)
Publication Year, Title
Title
(descending)
Type
Filter
Article
Search results
Efficient Xe Filling of MEMS Vapor Cells Empowered by Customized Triple Stack Wafer Bond Processing
Roshanghias, A.
,
Kaczynski, J.
,
Rodrigues, A.
,
Hübner, M.
,
Zauner, M.
,
Grosso, G.
,
Andrianov, N.
,
Khan, M.
,
Grömer, T.
,
Fuchs, T.
&
Binder, A.
,
29 Sept 2023
,
In:
ECS Transactions.
Research output
:
Contribution to journal
›
Article
›
peer-review
gyroscopes
100%
microelectromechanical systems
87%
vapors
68%
wafers
68%
nuclear magnetic resonance
54%
Highly Selective Plasma Etching Technique for Molybdenum: Highly Selective Plasma Etching Technique for Molybdenum
Osipov, A.
,
Andrianov, N.
,
Speshilova, A.
,
Gagaeva, A.
,
Risquez, S.
,
Vorobyev, A.
&
Alexandrov, S.
,
18 Feb 2023
,
In:
Plasma Chemistry and Plasma Processing.
p. 1-11
11 p.
Research output
:
Contribution to journal
›
Article
›
peer-review
Open Access
Plasma etching
100%
Molybdenum
78%
plasma etching
75%
Etching
72%
molybdenum
66%