Fingerprint
Dive into the research topics of 'Efficient Xe Filling of MEMS Vapor Cells Empowered by Customized Triple Stack Wafer Bond Processing'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Efficient Xe Filling of MEMS Vapor Cells Empowered by Customized Triple Stack Wafer Bond Processing
Ali Roshanghias, Jaroslaw Kaczynski, Augusto Rodrigues, Martina Hübner, Markus Zauner, Giovanna Grosso, Nikolai Andrianov, Muhammad Khan, Thomas Grömer, Tino Fuchs, Alfred Binder
Research output: Contribution to journal › Article › peer-review