Research output per year
Research output per year
Search results
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2023
Aluminum nitride on insulator: Material and processing optimization for integrated photonic applications
Spettel, J., Andrianov, N., Dubois, F., Furci, H., Cassese, T., Liffredo, M., Villanueva, L. G., Quack, N., Moridi, M. & Dao, T. D., 2023, EPJ Web of Conferences. Vol. 287.Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper
Open Access -
Dual-frequency piezoelectric micromachined ultrasonic transducers for fundamental and harmonic imaging
Zhai, Y., Maqsood, W., Da, Z., Andrianov, N., 张俞骋, Moridi, M. & Wu, L., 2023, IEEE MEMS.Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review
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Non-destructive Na content analysis in bonded silicon-glass microcavities using laser-induced breakdown spectroscopy
Bereczki, T., Cselyuszka, N., 张俞骋, Guso, E., Fugger-Schafhauser, D. M., Menezes de Oliveira, B. N., Roshanghias, A. & Andrianov, N., 2023, Optical Waveguide and Laser Sensors II,.Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review
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Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators
Terzic, T., Andrianov, N., Chouiki, M., Solonenko, D., De Pastina, A., Pashchenko, V. & Risquez, S., 2 Oct 2023, 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP).Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review
Open Access -
2022
Acoustofluidic Particle Focusing in PMMA Chips Using Low Frequency Lateral Resonances of The Piezoelectric Plate Transducer
Fuchsluger, K., Ecker, K., De Pastina, A., Andrianov, N., Cselyuszka, N., Moridi, M. & Jakoby, B., 2022, 48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES) .Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review
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A novel approach to characterize the sodium contamination caused by gas filling during anodic bonding
张俞骋, Solazzi, F., Cselyuszka, N., Sorschag, K., Andrianov, N., Bauscher, M., Schiffer, M., Lang, K-D., Moridi, M. & Schneider-Ramelow, M., 2022, Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS. p. 1 5 p.Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review
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ULTRA-FAST ACOUSTOFLUIDIC PARTICLE FOCUSING USING LATERAL MODES OF A PLATE TRANSDUCER
Fuchsluger, A., De Pastina, A., Mitteramskogler, T., Ecker, R., Voglhuber-Brunnmaier, T., Andrianov, N., Shatalov, A., Cselyuszka, N., Moridi, M. & Jakoby, B., 2022, (Accepted/In press) Transducers 2023: The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems. KyotoResearch output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review
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Utilizing Lateral Plate Transducer Modes for High Quality Acoustofluidics in Silicon-Based Chips
Fuchsluger, K., De Pastina, A., Nikolai, A., Roshanghias, A., Cselyuszka, N., Mitteramskogler, K., Ecker, K., Moridi, M. & Jakoby, B., 2022, Utilizing Lateral Plate Transducer Modes for High Quality Acoustofluidics in Silicon-Based Chips. p. 1 4 p.Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review
Open Access