Research output per year
Research output per year
Search results
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2023
Atomic Layer Deposition of Titanium Nitride in Horizontal Vias Using Hydrazine as Nitrogen Precursor
Fammels, J., Pilz, J. & Solonenko, D., 14 Dec 2023.Research output: Contribution to conference (No Proceedings) › Poster
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Spectroscopic ellipsometry of anisotropic AlScN pseudobinary alloys
Solonenko, D., 18 Sept 2023.Research output: Contribution to conference (No Proceedings) › Poster
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2022
Low-density SiOC thin films grown by low temperature plasma-enhanced chemical vapor deposition for high performance acoustic Bragg mirrors
Pilz, J., Andrianov, N., Sinani, T., Azeem, S. M., Dao, T. D., Moridi, M. & Bruckner, G., 10 Nov 2022.Research output: Contribution to conference (No Proceedings) › Poster
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Strong correlation of the piezoelectric response and microstructure in AlYN solid solutions
Solonenko, D., Strube, J., Fammels, J., Röbisch, V., Howell, K., Zhao, X., Pilz, J., Risquez, S., Moridi, M. & Bruckner, G., 19 Sept 2022.Research output: Contribution to conference (No Proceedings) › Poster
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Wide-spectral range DUV – MIR spectroscopic ellipsometry study of PECVD-grown silicon oxide and nitride thinfims: Wide-spectral range DUV – MIR spectroscopic ellipsometry study of PECVD-grown silicon oxide and nitride thinfims
Azeem, S. M., Spettel, J., Nikolai, A., Streque, J., Cassese, T., Pilz, J., Solonenko, D., Fleury, C., Dubois, F., Zhai, Y., Cselyuszka, N., Tortschanoff, A., Moridi, M. & Dao, T. D., 2022.Research output: Contribution to conference (No Proceedings) › Poster › peer-review