Research output per year
Research output per year
Search results
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2023
Actuation And Sensing For PZT Micromirrors Using d33 Mode Directional Interdigitated Electrodes
Thakkar, P., Lagosh, A., Petschnigg, M., Holzmann, D. & Pribosek, J., 1 Nov 2023, (Accepted/In press) IEEE SENSORS 2023.Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review
Open AccessFile -
Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators
Terzic, T., Andrianov, N., Chouiki, M., Solonenko, D., De Pastina, A., Pashchenko, V. & Risquez, S., 2 Oct 2023, 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP).Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review
Open Access -
2022
Spectroscopic ellipsometry study of parylene AF4
Solonenko, D., Petschnigg, M., Dao, T. D. & Miskovic, G., 4 Jul 2022, 2022 45th International Spring Seminar on Electronics Technology (ISSE).Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review