Publikationen pro Jahr
Publikationen pro Jahr
- 5 Ergebnisse
Suchergebnisse
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2023
Atomic Layer Deposition of Titanium Nitride in Horizontal Vias Using Hydrazine as Nitrogen Precursor
Fammels, J., Pilz, J. & Solonenko, D., 14 Dez. 2023.Publikation: Konferenzbeitrag › Poster
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Spectroscopic ellipsometry of anisotropic AlScN pseudobinary alloys
Solonenko, D., 18 Sep. 2023.Publikation: Konferenzbeitrag › Poster
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2022
Low-density SiOC thin films grown by low temperature plasma-enhanced chemical vapor deposition for high performance acoustic Bragg mirrors
Pilz, J., Andrianov, N., Sinani, T., Azeem, S. M., Dao, T. D., Moridi, M. & Bruckner, G., 10 Nov. 2022.Publikation: Konferenzbeitrag › Poster
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Strong correlation of the piezoelectric response and microstructure in AlYN solid solutions
Solonenko, D., Strube, J., Fammels, J., Röbisch, V., Howell, K., Zhao, X., Pilz, J., Risquez, S., Moridi, M. & Bruckner, G., 19 Sep. 2022.Publikation: Konferenzbeitrag › Poster
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Wide-spectral range DUV – MIR spectroscopic ellipsometry study of PECVD-grown silicon oxide and nitride thinfims: Wide-spectral range DUV – MIR spectroscopic ellipsometry study of PECVD-grown silicon oxide and nitride thinfims
Azeem, S. M., Spettel, J., Nikolai, A., Streque, J., Cassese, T., Pilz, J., Solonenko, D., Fleury, C., Dubois, F., Zhai, Y., Cselyuszka, N., Tortschanoff, A., Moridi, M. & Dao, T. D., 2022.Publikation: Konferenzbeitrag › Poster › Begutachtung