Physics & Astronomy
ellipsometry
100%
nitrides
84%
thin films
68%
microelectromechanical systems
46%
microstructure
45%
resonators
42%
hafnium
42%
seeds
42%
acoustics
41%
polycrystals
36%
actuation
35%
silicon oxides
35%
scandium
33%
silicon nitrides
33%
vapor deposition
30%
solid solutions
28%
etching
25%
engineering
25%
diffraction
24%
wurtzite
24%
electronics
23%
nanoparticles
23%
yttrium
21%
performance
21%
electrodes
21%
x rays
20%
atomic force microscopy
19%
filters
19%
textures
18%
coefficients
17%
polarization
17%
phonons
17%
oxides
16%
selectivity
16%
sputtering
16%
refractivity
15%
photonics
15%
high resolution
15%
masks
14%
aluminum
14%
interactions
13%
crystals
13%
sulfur
13%
flattening
13%
oscillators
12%
scanning electron microscopy
12%
transducers
12%
optical transition
11%
x ray diffraction
11%
nanoindentation
11%
ultraviolet radiation
11%
impurities
11%
optical properties
11%
torsion
11%
softening
11%
isolation
10%
glutathione
10%
gas mixtures
10%
epitaxy
9%
transmission electron microscopy
9%
extinction
9%
gradients
9%
low pressure
9%
modulus of elasticity
9%
magnetron sputtering
8%
trends
8%
energy
8%
platforms
8%
CMOS
8%
atmospheres
8%
direct current
8%
permittivity
7%
physical properties
7%
coatings
7%
oscillations
7%
augmentation
6%
fluorite
6%
ligands
6%
fabrication
6%
oxygen
6%
oxynitrides
6%
ferroelectric materials
6%
chemical bonds
6%
physics
6%
molecules
6%
nanocrystals
6%
chemical composition
6%
integrity
6%
field strength
6%
tensile stress
5%
microelectronics
5%
atomic structure
5%
halites
5%
characterization
5%
laser interferometry
5%
hardware
5%
wavelengths
5%
integrated circuits
5%
hysteresis
5%
Raman spectra
5%
Engineering & Materials Science
X ray diffraction
50%
Polycrystals
47%
Nanoparticles
33%
Thin films
32%
Resonators
32%
Film growth
27%
Acoustic waves
26%
Yttrium
24%
Carrier concentration
24%
Microstructure
22%
Atomic force microscopy
21%
Phonons
21%
Nitrides
20%
Nanoindentation
20%
Seed
17%
Transmission electron microscopy
17%
Permittivity
17%
Multilayers
16%
Impurities
16%
Transducers
16%
Elastic moduli
14%
Acoustics
13%
Oxygen
13%
Scanning electron microscopy
13%
Sulfur
13%
Fabrication
12%
Glutathione
12%
Substrates
12%
Nanocrystals
10%
Raman scattering
9%
Monitoring
9%
Ligands
9%
Chemical analysis
8%
Atoms
7%
Chemical Compounds
Liquid Film
32%
Sound Property
32%
Polycrystalline Solid
30%
Microstructure
23%
Nanoparticle
17%
X-Ray Diffraction
16%
Alloy
15%
Piezoelectricity
14%
Scanning Transmission Electron Microscopy
13%
Surface Phonon
12%
X-Ray Diffraction Method
11%
Nitride
10%
Dielectric Constant
10%
Electron Density
10%
Multilayer
10%
Atomic Force Microscopy
9%
Amorphous Structure
8%
Strain
7%
Phonon
7%
Sulfur Atom
6%
Glutathione
6%
Tetragonal Space Group
6%
Cubic Space Group
5%
Nanocrystal
5%
Raman Spectrum
5%
Dioxygen
5%
Energy
5%