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Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators
Tamara Terzic, Nikolai Andrianov, Mustapha Chouiki, Dmytro Solonenko, Annalisa De Pastina, Vladimir Pashchenko, Sarah Risquez
Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review