Research output per year
Research output per year
Research output
- 1 Conference Paper
Search results
-
2023
Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators
Terzic, T., Andrianov, N., Chouiki, M., Solonenko, D., De Pastina, A., Pashchenko, V. & Risquez, S., 2 Oct 2023, 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP).Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review
Open Access