Activities per year
Activities
- 2 Oral presentation
- 2 results
Search results
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Partial etching of Aluminum Scandium Nitride by Ion Beam Etching for next generation of RF MEMS Filter Applications
Tamara Terzic (Speaker), Nikolai Andrianov (Speaker), Annalisa De Pastina (Speaker) & Sarah Risquez (Speaker)
19 Jun 2023Activity: Talk or presentation › Oral presentation
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Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators
Tamara Terzic (Speaker), Nikolai Andrianov (Speaker), Mustapha Chouiki (Speaker), Dmytro Solonenko (Speaker), Annalisa De Pastina (Speaker), Vladimir Pashchenko (Speaker) & Sarah Risquez (Speaker)
30 May 2023Activity: Talk or presentation › Oral presentation