Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators

Activity: Talk or presentation › Oral presentation

Period30 May 2023
Event titleDesign, Test, Integration & Packaging of MEMS/MOEMS - 2023
Event typeConference
LocationValletta, MaltaShow on map

Keywords

  • AlScN
  • Etching
  • Dry Etching
  • Wet Etching
  • IBE