Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators
- Terzic, T. (Redner)
- Andrianov, N. (Redner)
- Mustapha Chouiki (Redner)
- Solonenko, D. (Redner)
- De Pastina, A. (Redner)
- Pashchenko, V. (Redner)
- Sarah Risquez (Redner)
Aktivität: Präsentation oder Vortrag › Vortrag