The Effect of CH4/H2 Gas Admixture on the Selectivity towards Pt in Dry Etching of PZT Thin-Films by ICP-RIE
- Petschnigg, M. (Redner)
- Andrianov, N. (Redner)
- Azeem, S. M. (Redner)
- Susan Trolier-McKinstry (Redner)
Aktivität: Präsentation oder Vortrag › Poster Präsentation