Fingerprint
Dive into the research topics of 'Stress-free bonding technology with bondable thin glass layer for MEMS based pressure sensor'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Stress-free bonding technology with bondable thin glass layer for MEMS based pressure sensor
Xiaodong Hu, P. Mackowiak, Yucheng Zhang, Oswin Ehrmann, Klaus-Dieter Lang, Martin Schneider-Ramelow, Ulli Hansen, Simon Maus, Oliver Gyenge, Maozhou Meng, Ha-Duong Ngo
Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper