Material constants extraction for AlScN thin films using a dual mode BAW resonator

Fazel Parsapour, Vladimir Pashchenko, Pascal Nicolay, Paul Muralt

    Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

    Fingerprint

    Dive into the research topics of 'Material constants extraction for AlScN thin films using a dual mode BAW resonator'. Together they form a unique fingerprint.

    Physics & Astronomy