Material constants extraction for AlScN thin films using a dual mode BAW resonator

Fazel  Parsapour; Vladimir Pashchenko; Pascal Nicolay; Paul Muralt

doi:10.1109/MEMSYS.2018.8346667

Material constants extraction for AlScN thin films using a dual mode BAW resonator

Fazel Parsapour, Vladimir Pashchenko, Pascal Nicolay, Paul Muralt

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Abstract

Dual mode bulk acoustic wave resonators were fabricated using tilted c-axis oriented grains. In this case, longitudinal and shear modes are excited at the same time. The stiffness matrix for the tilted geometry was derived, and served to determine c 33 and c 44 from the two basic resonance frequencies. In addition, it was possible to estimate the tilting angle from the ratio of the sound velocities.

Original language	English
Title of host publication	Material constants extraction for AlScN thin films using a dual mode baw resonator
ISBN (Electronic)	2160-1968
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346667
Publication status	Published - 26 Apr 2018
Event	2018 IEEE Micro Electro Mechanical Systems - Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018

Conference

Conference	2018 IEEE Micro Electro Mechanical Systems
Abbreviated title	MEMS
Country/Territory	United Kingdom
City	Belfast
Period	21/01/18 → 25/01/18

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10.1109/MEMSYS.2018.8346667

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@inproceedings{a500a147b88b49a99f45dfb4dfcd6e79,

title = "Material constants extraction for AlScN thin films using a dual mode BAW resonator",

abstract = "Dual mode bulk acoustic wave resonators were fabricated using tilted c-axis oriented grains. In this case, longitudinal and shear modes are excited at the same time. The stiffness matrix for the tilted geometry was derived, and served to determine c 33 and c 44 from the two basic resonance frequencies. In addition, it was possible to estimate the tilting angle from the ratio of the sound velocities.",

author = "Fazel Parsapour and Vladimir Pashchenko and Pascal Nicolay and Paul Muralt",

year = "2018",

month = apr,

day = "26",

doi = "10.1109/MEMSYS.2018.8346667",

language = "English",

booktitle = "Material constants extraction for AlScN thin films using a dual mode baw resonator",

note = "2018 IEEE Micro Electro Mechanical Systems, MEMS ; Conference date: 21-01-2018 Through 25-01-2018",

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T1 - Material constants extraction for AlScN thin films using a dual mode BAW resonator

AU - Parsapour, Fazel

AU - Pashchenko, Vladimir

AU - Nicolay, Pascal

AU - Muralt, Paul

PY - 2018/4/26

Y1 - 2018/4/26

N2 - Dual mode bulk acoustic wave resonators were fabricated using tilted c-axis oriented grains. In this case, longitudinal and shear modes are excited at the same time. The stiffness matrix for the tilted geometry was derived, and served to determine c 33 and c 44 from the two basic resonance frequencies. In addition, it was possible to estimate the tilting angle from the ratio of the sound velocities.

AB - Dual mode bulk acoustic wave resonators were fabricated using tilted c-axis oriented grains. In this case, longitudinal and shear modes are excited at the same time. The stiffness matrix for the tilted geometry was derived, and served to determine c 33 and c 44 from the two basic resonance frequencies. In addition, it was possible to estimate the tilting angle from the ratio of the sound velocities.

U2 - 10.1109/MEMSYS.2018.8346667

DO - 10.1109/MEMSYS.2018.8346667

M3 - Conference Paper

BT - Material constants extraction for AlScN thin films using a dual mode baw resonator

T2 - 2018 IEEE Micro Electro Mechanical Systems

Y2 - 21 January 2018 through 25 January 2018

ER -

Material constants extraction for AlScN thin films using a dual mode BAW resonator

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