Abstract
In this paper, we report the integration of a non-CMOS transition metal oxide composite thin film with a high negative temperature coefficient resistance (NTCR) of 3.8 %/K on a silicon nitride membrane for uncooled infrared microbolometer working in the long wavelength infrared (LWIR) region. The NTC thin film is fabricated by a chemical solution deposition process requiring high crystallization temperature (>750°C). Different micromachined silicon-nitride membrane-supported bolometers (1, 2×2 and 4×4 pixels) with a 170×170 µm 2 pixel size are successfully fabricated and packaged in a vacuum-shielded TO housing. The fabricated devices exhibit a typical noise equivalent temperature difference (NETD) value down to 15 mK×Hz -1/2 and a high specific detectivity characteristic of 1.4×10 8 cm×Hz 1/2 ×W -1 .
Originalsprache | Englisch |
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Titel | Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR Detection |
DOIs | |
Publikationsstatus | Veröffentlicht - 2023 |
Veranstaltung | 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) - Science Congress Center Munich Walther-von-Dyck Straße 10 , 85748 Garching bei München, Deutschland Dauer: 15 Jän. 2023 → 19 Jän. 2023 https://mems23.org/ |
Konferenz
Konferenz | 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) |
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Kurztitel | IEEE MEMS 2023 |
Land/Gebiet | Deutschland |
Ort | 85748 Garching bei München |
Zeitraum | 15/01/23 → 19/01/23 |
Internetadresse |