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Highly textured AlN and Al0.7Sc0.3N piezoelectric thin films with Hf(0002) seed layer
Sarah Risquez, Julian Pilz, Volker Röbisch, Gibin Nellinilkkum Thadathil Jolly, Kaitlin Howell, Andrea Mazzalai, Bernd Heinz, Mohssen Moridi, Dmytro Solonenko
Research output: Contribution to conference (No Proceedings) › Abstract › peer-review