Highly textured AlN and Al0.7Sc0.3N piezoelectric thin films with Hf(0002) seed layer

Physik & Astronomy

• hafnium 100%
• seeds 74%
• thin films 41%
• textures 20%
• filters 17%
• scandium 10%
• curves 8%
• coupling coefficients 8%
• microphones 8%
• compatibility 8%
• microelectromechanical systems 7%
• templates 7%
• nitrides 7%
• CMOS 7%
• resonant frequencies 7%
• thermal stability 7%
• Q factors 7%
• magnetron sputtering 6%
• routes 6%
• transducers 6%
• chambers 6%
• sputtering 6%
• direct current 6%
• argon 6%
• atomic force microscopy 6%
• grain size 6%
• optics 5%
• aluminum 5%
• transmission electron microscopy 5%
• gradients 5%
• scanning electron microscopy 5%
• microstructure 4%
• acoustics 4%
• silicon 4%