Abstract
Implementing Additively Manufactured Redistribution Layers (AM-RDL) for Fan-Out Wafer-Level Packaging (FOWLP) has spurred interest recently. Especially for MEMS FOWLP, where the standard fabrication of RDLs faced challenges to provide conformity to 3D topographies or protecting delicate structures, AM-RDLs can be regarded as the most promising approach. The state-of-the-art AM RDLS (e.g. inkjet printed) are lagging way behind the lithography-based ones due to inferior feature sizes (i.e. higher line/ space or high pitch interconnects). To address this bottleneck, in this study a recently-developed Ultra-Precision Deposition (UPD) technology was utilized to print high-resolution RDLs. By optimizing UPD printing parameters, such as printing pressure, nozzle size, nozzle movement and speed, ultra-fine silver (Ag) and polyimide features were extrusion printed. Here, molded daisy chain chips were used as test samples, on which ultra-fine Ag RDLs with an average width of 6.5 µm and thickness of 2.7 µm were printed successfully. Electrical test and cross-sectional analysis verified line continuity and full out-of-plane offset (Z-step) coverage at the chip/ epoxy molding compound (EMC) interface. Additionally, multilayering of printed layers for high-density FOWLP was demonstrated.
Original language | English |
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Title of host publication | 2022 IEEE 9th Electronics System-Integration Technology Conference (ESTC) |
Pages | 254-258 |
Number of pages | 5 |
DOIs | |
Publication status | Published - 16 Sept 2022 |
Event | 2022 IEEE 9th Electronics System-Integration Technology Conference (ESTC) - Sibiu, Romania Duration: 13 Sept 2022 → 16 Sept 2022 |
Conference
Conference | 2022 IEEE 9th Electronics System-Integration Technology Conference (ESTC) |
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Period | 13/09/22 → 16/09/22 |
Keywords
- Micromechanical devices
- Radio frequency
- Silver
- Three-dimensional displays
- Program processors
- Polyimides
- Surfaces