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Aluminum nitride on insulator: Material and processing optimization for integrated photonic applications
Jasmin Spettel, Nikolai Andrianov, Florian Dubois, Hernán Furci, Tommaso Cassese, Marco Liffredo, Luis Guillermo Villanueva, Niels Quack, Mohssen Moridi, Thang Duy Dao
Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper