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A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors
Clément Fleury, Markus Bainschab, Roberto Carminati, Gianluca Mendicino, Pooja Thakkar, Dominik Holzmann, Sara Rodrigues Palma Guerreiro, Adrien Piot
Research output: Contribution to conference (No Proceedings) › Paper