A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors

Clément Fleury, Markus Bainschab, Roberto Carminati, Gianluca Mendicino, Pooja Thakkar, Dominik Holzmann, Sara Rodrigues Palma Guerreiro, Adrien Piot

Publikation: Konferenzbeitrag › Papier

Physik & Astronomy