Abstract
We demonstrate the experimental assessment of a high-Q, high-angle piezoelectric (2 µm PZT) MEMS scanning micromirror featuring distributed backside reinforcement, suitable for application demanding energy efficient and high-quality image projection. Frequency response measurements at 10 different vacuum levels ranging from atmospheric pressure to 10-6 mbar allow for the quantitative separation of damping mechanisms (air and structural). Stroboscopic digital holographic microscopy was used to assess the static and dynamic deformation of the mirror surface. The experimental results are in good agreement with simulations and models.
Originalsprache | Englisch |
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Publikationsstatus | Veröffentlicht - 2023 |
Veranstaltung | Eurosensors 2023: XXXV CONFERENCE - Lecce, Italy, Lecce, Italien Dauer: 10 Sep. 2023 → 13 Sep. 2023 https://www.eurosensors2023.eu/ |
Konferenz
Konferenz | Eurosensors 2023 |
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Land/Gebiet | Italien |
Ort | Lecce |
Zeitraum | 10/09/23 → 13/09/23 |
Internetadresse |