Javad Abbaszadeh – Research output — Silicon Austria Labs

9 Article
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2023

Dual-frequency piezoelectric MEMS microphones based on AlSc 30% N thin films for aeroacoustic measurements
Wu, L., Zhai, Y., Lokesh, O., Bourquard, C., Abbaszadeh, J., Andrianov, N., Garcia souto, J. A., Nguyen, T. A. T., Chen, X., Erbacher, K., Ngo, H-D., Sainges, O. & Julliard, E., 8 Jun 2023.
Research output: Contribution to conference (No Proceedings) › Paper › peer-review