Dual-frequency piezoelectric MEMS microphones based on AlSc
              30%
              N thin films for aeroacoustic measurements

Lixiang Wu; Yanfen Zhai; Onteru Lokesh; Claire Bourquard; Javad Abbaszadeh; Nikolai Andrianov; Jose a. Garcia souto; Thai anh tuan Nguyen; Xuyuan Chen; Kolja Erbacher; Ha-Duong Ngo; Olivier Sainges; Emmanuel Julliard

doi:10.2514/6.2023-4391

Dual-frequency piezoelectric MEMS microphones based on AlSc 30% N thin films for aeroacoustic measurements

Lixiang Wu, Yanfen Zhai, Onteru Lokesh, Claire Bourquard, Javad Abbaszadeh, Nikolai Andrianov, Jose a. Garcia souto, Thai anh tuan Nguyen, Xuyuan Chen, Kolja Erbacher, Ha-Duong Ngo, Olivier Sainges, Emmanuel Julliard

Research output: Contribution to conference (No Proceedings) › Paper › peer-review

Original language	English
DOIs	https://doi.org/10.2514/6.2023-4391
Publication status	Published - 8 Jun 2023

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10.2514/6.2023-4391

https://arc.aiaa.org/doi/10.2514/6.2023-4391

Cite this

@conference{63a77bc515774f17b7986d7068b39172,

title = "Dual-frequency piezoelectric MEMS microphones based on AlSc 30% N thin films for aeroacoustic measurements",

author = "Lixiang Wu and Yanfen Zhai and Onteru Lokesh and Claire Bourquard and Javad Abbaszadeh and Nikolai Andrianov and {Garcia souto}, {Jose a.} and Nguyen, {Thai anh tuan} and Xuyuan Chen and Kolja Erbacher and Ha-Duong Ngo and Olivier Sainges and Emmanuel Julliard",

year = "2023",

month = jun,

day = "8",

doi = "10.2514/6.2023-4391",

language = "English",

}

TY - CONF

T1 - Dual-frequency piezoelectric MEMS microphones based on AlSc 30% N thin films for aeroacoustic measurements

AU - Wu, Lixiang

AU - Zhai, Yanfen

AU - Lokesh, Onteru

AU - Bourquard, Claire

AU - Abbaszadeh, Javad

AU - Andrianov, Nikolai

AU - Garcia souto, Jose a.

AU - Nguyen, Thai anh tuan

AU - Chen, Xuyuan

AU - Erbacher, Kolja

AU - Ngo, Ha-Duong

AU - Sainges, Olivier

AU - Julliard, Emmanuel

PY - 2023/6/8

Y1 - 2023/6/8

U2 - 10.2514/6.2023-4391

DO - 10.2514/6.2023-4391

M3 - Paper

ER -