Research output per year
Research output per year
Search results
-
2023
Atomic Layer Deposition of Titanium Nitride in Horizontal Vias Using Hydrazine as Nitrogen Precursor
Fammels, J., Pilz, J. & Solonenko, D., 14 Dec 2023.Research output: Contribution to conference (No Proceedings) › Poster
-
2022
Strong correlation of the piezoelectric response and microstructure in AlYN solid solutions
Solonenko, D., Strube, J., Fammels, J., Röbisch, V., Howell, K., Zhao, X., Pilz, J., Risquez, S., Moridi, M. & Bruckner, G., 19 Sept 2022.Research output: Contribution to conference (No Proceedings) › Poster