Keywords
- PZT
- RIE
- ICP-RIE
- dry etching
Impact of Precursor Chemistry on the Selectivity in Pb(Zr1-xTix)O3 ICP-RIE Etching
- Petschnigg, M. (Speaker)
- Sarah Risquez (Speaker)
- Azeem, S. M. (Speaker)
- De Pastina, A. (Speaker)
- Lagosh, A. (Speaker)
- Andrianov, N. (Speaker)
Activity: Talk or presentation › Oral presentation